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Micro Resist Technology Products - Micro Resist Technology -
Various resist medicines of the Micro Resist Technology Products are sold as a sole agency in Japan of Micro Resist Technology.
Please feel free to contact me when there are a question and a demand, etc.
Negative photoresists for UV & electron beam lithography
- ma-N 400
- ma-N 1400
- ma-N 2400
- mr-EBL 6000 and mr-UVL 600
- EpoCore and EpoClad
Different negative photoresists series designed
for various applications
- conventional pattern transfer
- lift-off process
- use as permanent material
E
Ready-to-use solutions in a variety of viscosities
PDFMaterials for Nanoimprint Lithography
- Thermoplastics
- Curing polymers (thermosets)
- UV-curable polymers
Excellent fi lm quality
* Coating of various substrate materials, e.g. Si, SiO2, Al
* Attainable smallest feature size at least 50 nm
(depending on mould resolution)
* Excellent pattern transfer fi delity
* Safe solvents
Hybrid Polymers
- Ormocomp
- Ormocore
- Ormoclad
- Ormostamp
Excellent transparency
* Excellent mechanical properties
* High chemical and physical stability
* Excellent pattern transfer fi delity
* Ready-to-use solutions
* Solvent-free
Positive Photoresists
- ma-P 1200 Series
- ma-P 1275
- ma-P 1275 HV
Sensitivity to g-line, i-line or broadband exposure
* No post exposure bake
* Easy removal
* Ready-to-use resist solutions in a variety of viscosities
* Broad process window and easy to handle