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High Purity AlN Susceptor for MOCVD


It has the thermal expansion coefficient matched with Silicon.
High purity AlN material 99.9% are used for this parts.
It excels in the corrosion resistance of the plasma-proof and fluorine systems gas.
Heat conduction and thermal emissivity are large, soaking is high.
Creation of large-sized size is possible.(The maximum size 465mm in diameter)